Übung zu Optical Lithography- Lecturer
- PD Dr. rer. nat. Andreas Erdmann
- Details
- Übung
2 cred.h, Sprache Deutsch, Für Master AOT verpflichtende Zusatzveranstaltung, für andere Studiengänge freiwillig
Time and place: Wed 12:00 - 14:00, AOT-Bibliothek; comments on time and place: On 29th Oct, 19th Nov and 10th Dec the course starts only at 13.00.
- Fields of study
- WF AOT-GL ab 1
- Additional information
- Expected participants: 10
- Assigned to: Optical Lithography: Technology, Physical Effects, and Modelling
- Department: Chair of Electron Devices (Prof. Dr. Frey)
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