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Scanning Electron Microscopy in Materials Science and Nanotechnology (IMN_M3/4/5/10/11-MWT_M10/11-NT_SEM)5 ECTS (englische Bezeichnung: Scanning Electron Microscopy in Materials Science and Nanotechnology)
Modulverantwortliche/r: Erdmann Spiecker Lehrende:
Thomas Przybilla, Erdmann Spiecker
Startsemester: |
WS 2021/2022 | Dauer: |
1 Semester | Turnus: |
jährlich (WS) |
Präsenzzeit: |
60 Std. | Eigenstudium: |
90 Std. | Sprache: |
Deutsch und Englisch |
Lehrveranstaltungen:
Inhalt:
The module focuses on the introduction to and application of Scanning Electron Microscopy (SEM) in Materials Science and Nanotechnology and comprises a lecture with corresponding exercises.
Amongst others, the following topics are addressed:
• Components of an SEM instrument
• Elastic/inelastic electron-probe/sample interactions, interaction volume, generation of secondary and backscattered electrons
• Contrast mechanisms of different detector systems
• Topographic und chemically-sensitive imaging
• Electron diffraction and its application in SEM
• Scanning Transmission Electron Microscopy (STEM)
• Quantitative X-ray spectroscopy
• Focused ion beams (Dual-Beam FIB, He-ion microscopy)
• Preparation-specific challenges
• Application examples
Specific topics are accompanied with suitable exercises (e.g. Monte-Carlo simulations to simulate electron trajectories).
Lernziele und Kompetenzen:
Die Studierenden
- Wissen
- • Introduction to the basic concepts of and physics behind SEM
- Verstehen
- • Overview over applications and deeper understanding of SEM and FIB techniques in materials science on the micro- and nanoscale
• Enhancement of knowledge through teaching of current SEM applications and state-of-the-art developments in research
- Anwenden
- • Application and consolidation of taught contents by SEM-related exercises
Literatur:
• Reimer, Scanning Electron Microscopy, Springer Verlag.
• Goodhews, Humphreys and Beanland: Electron Microscopy and Analysis
• Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis (2003)
• N. Yao, Focused Ion Beam Systems, Basics and Applications, Cambridge University Press, 2010.
• L.A. Gianuzzi, F.A. Stevie, Introduction to Focused Ion Beams. Instrumentation, Theory, Techniques and Practice, Springer, 2005.
• J. Orloff, M. Utlaut, L. Swanson, High Resolution Focused Ion Beams: FIB and its Applications, Springer, 2003
• Lecture notes.
Studien-/Prüfungsleistungen:
Scanning Electron Microscopy in Materials Science and Nanotechnology (Prüfungsnummer: 62831)
(englischer Titel: Scanning Electron Microscopy in Materials Science and Nanotechnology)
- Prüfungsleistung, mündliche Prüfung, Dauer (in Minuten): 15, benotet, 5 ECTS
- Anteil an der Berechnung der Modulnote: 100.0 %
- weitere Erläuterungen:
Prüfungssprache nach Wahl der Studierenden
- Prüfungssprache: Deutsch oder Englisch
- Erstablegung: WS 2021/2022, 1. Wdh.: SS 2022
1. Prüfer: | Erdmann Spiecker |
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UnivIS ist ein Produkt der Config eG, Buckenhof |
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