Scanning Electron Microscopy in Materials Science and Nanotechnology (IMN_M3/4/5/10/11-MWT_M10/11-NT_SEM)5 ECTS
(englische Bezeichnung: Scanning Electron Microscopy in Materials Science and Nanotechnology)
(Prüfungsordnungsmodul: Scanning Electron Microscopy in Materials Science and Nanotechnology)

Lectures:

• • Rasterelektronenmikroskopie in Materialforschung und Nanotechnologie
    (Vorlesung, 2 SWS, Erdmann Spiecker et al., Tue, 8:15 - 9:45, 0.68; Course will take place in person. For further information please join on StudOn: https://www.studon.fau.de/crs3339808_join.html .)
  • Übungen zur Rasterelektronenmikroskopie
    (Übung, 2 SWS, Erdmann Spiecker et al., Zeit und Raum n.V.)

Inhalt:

The module focuses on the introduction to and application of Scanning Electron Microscopy (SEM) in Materials Science and Nanotechnology and comprises a lecture with corresponding exercises. Amongst others, the following topics are addressed: • Components of an SEM instrument • Elastic/inelastic electron-probe/sample interactions, interaction volume, generation of secondary and backscattered electrons • Contrast mechanisms of different detector systems • Topographic und chemically-sensitive imaging • Electron diffraction and its application in SEM • Scanning Transmission Electron Microscopy (STEM) • Quantitative X-ray spectroscopy • Focused ion beams (Dual-Beam FIB, He-ion microscopy) • Preparation-specific challenges • Application examples Specific topics are accompanied with suitable exercises (e.g. Monte-Carlo simulations to simulate electron trajectories).

Lernziele und Kompetenzen:

Die Studierenden

Wissen

• Introduction to the basic concepts of and physics behind SEM

Verstehen

• Overview over applications and deeper understanding of SEM and FIB techniques in materials science on the micro- and nanoscale • Enhancement of knowledge through teaching of current SEM applications and state-of-the-art developments in research

Anwenden

• Application and consolidation of taught contents by SEM-related exercises

Literatur:

• Reimer, Scanning Electron Microscopy, Springer Verlag. • Goodhews, Humphreys and Beanland: Electron Microscopy and Analysis • Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis (2003) • N. Yao, Focused Ion Beam Systems, Basics and Applications, Cambridge University Press, 2010. • L.A. Gianuzzi, F.A. Stevie, Introduction to Focused Ion Beams. Instrumentation, Theory, Techniques and Practice, Springer, 2005. • J. Orloff, M. Utlaut, L. Swanson, High Resolution Focused Ion Beams: FIB and its Applications, Springer, 2003 • Lecture notes.

Verwendbarkeit des Moduls / Einpassung in den Musterstudienplan:

1. Nanotechnologie (Master of Science)
   (Po-Vers. 2020w | TechFak | Nanotechnologie (Master of Science) | Gesamtkonto | 1. und 2. Naturwissenschaftlich-technisches Wahlmodul | Scanning Electron Microscopy in Materials Science and Nanotechnology)

Studien-/Prüfungsleistungen:

Scanning Electron Microscopy in Materials Science and Nanotechnology (Prüfungsnummer: 62831)

(englischer Titel: Scanning Electron Microscopy in Materials Science and Nanotechnology)

Prüfungsleistung, mündliche Prüfung, Dauer (in Minuten): 15, benotet, 5 ECTS

Anteil an der Berechnung der Modulnote: 100.0 %

weitere Erläuterungen:
Prüfungssprache nach Wahl der Studierenden

Prüfungssprache: Deutsch oder Englisch

Erstablegung: WS 2021/2022, 1. Wdh.: SS 2022

1. Prüfer:

Erdmann Spiecker