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Übung zu Optical Lithography
Lecturer
PD Dr. rer. nat.
Andreas Erdmann
Details
Übung
Online
2 cred.h, Sprache Deutsch, Für Master AOT verpflichtende Zusatzveranstaltung, für andere Studiengänge freiwillig
Zeit: Fri 16:15 - 17:45; n.V.
Fields of study
WF AOT-GL ab 1
PF NT-MA 1
WF EEI-BA ab 5
WF EEI-MA ab 1
Additional information
Expected participants: 1
Assigned to:
Optical Lithography: Technology, Physical Effects, and Modelling
Verwendung in folgenden UnivIS-Modulen
Startsemester WS 2021/2022
:
Kernfach Mikro- und Nanostrukturforschung für MWT (MNF_M1_MWT)
Optical Lithography (OLITHO)
Top-Down Nanostrukturierung (Nano_Top_Down)
Department:
Chair of Electron Devices
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