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Nanotechnologie (Master of Science)
>>
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Übung zu Optical Lithography
Lecturer
PD Dr. rer. nat.
Andreas Erdmann
Details
Übung
2 cred.h, Sprache Deutsch, Für Master AOT verpflichtende Zusatzveranstaltung, für andere Studiengänge freiwillig
Time and place: Mon 14:15 - 15:45,
Hans-Georg-Waeber-Saal
,
0.157-115
Fields of study
WF AOT-GL ab 1
PF NT-MA 1
Additional information
Expected participants: 5
Assigned to:
Optical Lithography: Technology, Physical Effects, and Modelling
Verwendung in folgenden UnivIS-Modulen
Startsemester WS 2016/2017
:
Kernfach Mikro- und Nanostrukturforschung für MWT (MNF_M1_MWT)
Optical Lithography (OLITHO)
Top-Down Nanostrukturierung (Nano_Top_Down)
Department:
Chair of Electron Devices (Prof. Dr. Frey)
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